Theoretical And Experiment Research On Ferrofluid Micro Differential Pressure Sensor

Micro differential pressure sensor is widely applied to many fields, such as aviation and space flight, industrial process control, machinery manufacture, biomedical engineering etc. According to the trend of micromation, integration and intelligence, many different kinds of micro differential pressure sensors have been invented and more excellent property sensors will be reseached with the development of science and technology. Investigation of excellent property sensors have become the world focus by applying new theory, new material and new structure.Ferrofluid, as a new nano functional material, has both magnetism and fluidity. It was widely applied to many fields for this characteristic as soon as it was invented. The application of ferrofluid in sensor field is attracting more attention now.The application of ferrofluid in micro differential pressure sensor is a new subject in China. The thesis mainly studied on a design method of micro differential pressure sensor based on ferrofluid, which is of great significance for the development of new sensors.The main contents of this thesis are as follows:(1) A theoretical model was established, and the input-output relationship of the sensor was derived(2) The structure of the sensor was designed and the test-bed was put up.(3) The circuit of the sensor was designed, simulation was conducted and the experimental data was collected.(4) The parameters of the sensor were researched.(5) The preparation for the next step was made according to the problems of the preliminary experiments.Experiments showed that the sensor possesses the features of good linearity, high sensitivity and stability, which can be widely applied to many fields. In short, this new type of micro differential pressure sensor will surely accelerate development of sensor field and have profound significance for the invention of new sensors.