Research On Micro-optical Scanner

Rotating prisms or reflectors are used in most optical scanners at present. However, with the development of modern technology, these methods have their shortcomings such as huge volume and low scanning velocity. Micro-optics technology is a advanced technology of photoelectricity which developed in 90's. In the field of national defence, aviation and spaceflight, the micro-optics scanner are widely applied to laser controlling and guiding, photoelectricity tracking.This paper introduced the principle and designment of three styles of micro-optics scanner: Kepler micro-optics scanner, Galilei micro-optics scanner and micro-mirror scanner. Photic characteristic, mechanical driver and driver circuit of each micro-optics scanner are described in this paper. The most important part is photic characteristic.Firstly, in kepler micro-optics scanner, fabrication of convex microlens array is based on heat-reflow method. The core of driver circuit is 89C2051 single chip. Two microlens array are drived by electromagnetic attraction in order to change the way of incidence light. Secondly, in galilei micro-optics scanner, the fabrication of positive microlens array and the scanning principle is the same as kepler micro-optics scanner. And the negative microlens are made by proposing two kinds of material. Lastly, the fabrication of micro-mirror is based on photolithography and plating technology. Each unit of micro-mirror is drived by static gravitation in order to change the way of incidence light. Fraunhofer diffraction theory for the three kinds of system are established and simulated by computer.