Decoupling Rsearch Of 6-D Force Sensor Based On Piezoelectric Quartz

The giant heavy-load manufacturing equipment is the basic equipment along the manufacturing industry chain, and it embodies the national ability and the standard of high-point manufacturing, and it affects the carrying out of the major projects of national economy and defense build-up. The giant heavy-load manufacturing equipment requires the multidimental and skillful operating ability on condition that is extremely heavy-loaded, sensor and measureing is the importand component part. During the operating process of the giant heavy-load manufacturing equipment, the measuring and the real-time feedback the 6-D forces are the base to achieve the harmonious control of multi equipments and compliance control the forces. In order to achieve the feedback control of the forces, the measuring of the 6-D forces is demanded; thereby it is the first problem to resolve how to achieve the measurement of the 6-D forces on shaft.In this paper, piezoelectric quartz, wich has good dynamic performance, is selected as the force sensing element to design the sensor with parallel mechanism. According to the calibration of the 6-D forces on the working face of the sensor, the performance of the sensor to measure the 6-D forces is studied; and the sensor is further used to measure the 6-D forceson shaft, and calibration and decoupling are carried out.Firstly, according to the theory of mechanics of matrerials, the maths model of 6-Dforces on shaft is derived innovatively, and the principle the measuring of 6-D forces on shaft;according to the theory of theoretical mechanics, the special layout of 4 standing points isdesigned with the wafer integration of 3-D forces sensor, and the sensor is made and themechanical model of the sensor is developed.Secondly, calibration device is designed and made, the calibration of 6-D forces on theworking face of the sensor is carried out, and the couplig is studied; the ideal coupled matrixis developed and the decoupling of the data is analyzed.Finally, the clamping device of the sensor is designed according to the principle of theelastic ring, and it can calmp the sensor and the shaft together at the axial and radial directionswithout harming the shaft. According to the analyzing the calibration points, the mechanicalmodel of the sensor is mended to gain the equsion of the 6-D forces on shaft. According to the calibration course of 6-D forces on the working face of the sensor ,the calibraiong of 6-D forces on shaft is carried out, and the decoupling of the data is analyzed.The result indicates that the sensor can measure the 6-D forces not only on the woring face of the sensor but on the shaft.