Study On Thermal Radiation Of Surface Grating Based On The Excitation Of Surface Electromagnetic Wave

Surface Electromagnetic Wave (SEW) is a coupling wave field between the electromagnetic wave and the collective vibration wave such as lattice vibration wave or electron gas wave on surface of some solid state materials. Their corresponding coupling-field quantum are surface phonon polariton or surface plasmon polariton, Surface plasmon resonance (SPR) technology, which is based on the surface plasmon polariton excitation, is successfully applied in the Biology, Chemistry and other fields and the SPR sensors became the important scientific instrument in the experimental research. In recent years, because of the advances in the field of near-field optics and micro-nano manufacturing technology, surface electromagnetic wave have gained growing attentions and achieved some remarkable fruits in micro-nano optics. Recent developments show that based on surface electromagnetic wave excitation, infrared heat radiation source with specific surface grating can achieve highly coherent emission and behavior like antennas. This new source of the infrared emission has important applications in the areas of the infrared gas sensing, frequency spectrum detection, infrared encryption, space stealth and so on.In this paper, we researched the design and the fabrication of the SEW thermal radiation modulate devices, which are mainly based on surface phonon polariton excited by the surface grating coupling. We also researched the detailed fabrication processing of SiC and SiO₂ gratings, and experimental measurement methods. The main works and the obtained results are as follows:(1) Analyze the theory of surface electromagnetic wave coupling with prism and grating. We got the dispersion relation of SEW coupling with SiC grating and obtain the coupling resonance wavelength of SEW, which guided the subsequent design work.(2) Design and fabricate several kinds of one-and two-dimensional grating structure on SiC substrate as well as on silicon substrate with SiO2 film. A bi-layer mask process is proposed and the technique of magnetic enhanced reactive ion etching (MERIE) of SiC was studied to determine the optimal processing parameters.(3) Design and fabricate micro-heating system for thermal radiation devices measurement. Finite Element Analysis (FEA) of the temperature field for the micro-heating devices is achieved and the results show that the devices can meet the demand of thermal radiation devices measurement.(4) Design a variety of testing schemes, whose feasibility analysis and experimental research were executed. We tested SiC and SiO2 infrared reflectance spectrum by the use of Fourier Transform Infrared spectroscopy (FTIR) which proved the existence of surface phonon on SiC.