Design Of Micro-cantilever-based And Magnetic Bead-based Immunosensor

This paper reports a comprehensive theoretical, finite element analysis of cantilever-based and magnetic bead-based immunosensor for realizing the high-throughput identification and quantity of a large number of biological molecules, at the same time, realizing the sensor reusable. Especially, this immunosensor can be easily fabricated with the Micro-Electro-Mechanical Systems (MEMS) technology. At the same time, the paper applied the magnetic separation technique to implement the magnetic bead-based immunosensor, designing and simulating the planar micro-electromagnet on the cantilever surface with ANSYS, Matlab and Femlab software. These methods and some conclusions presented in this paper provide a solid and useful basis for the design of a micro-fluidic bio-molecule separation and detection system using U-shaped cantilever, magnetic fields and magnetic beads.The introduction of the fabrication process of the biosensor includes the single- crystal silicon processes and SOI processes. The biosensor would be fabricated from SOI wafers that were used for reducing the thickness of the cantilevers because the buried oxide (BOX) layer of SOI wafers provides the etch stop. Layout design and process design based on SOI processes are made according to the Specification of the MEMS line in China electronics technology group the 13th research institute.At the same time,This paper describes something about MASA(Multi-Analyte Suspension Array). Now, the detection of biological molecules is more and more important because it contacts closely with people's life. To detect simply and conveniently has become the focus, same as the precision of the detected result. According to these, a program of double-side biochip for bioassays is brought up. After discussing, a good fabrication process is determined.