Theoretical Study On Four-Point Probe

Today, with the development in the calculator technique, the saving capacity of computer enlarges increasingly day by day, so put forward a higher request to the manufacturing craft of integrated circuit, the sketch requests integrated circuit smaller, the electric circuit size contracts continuously. Now, the characteristic size of integrated circuit has already come to 90 nms, requesting a wafer diameter enlarge continuously with the exaltation rate of production, on the other hand wafer perfection, machine and electricity characteristic to request more strictly. The science of electricity characteristic and tiny area has already become the key factor of the component's capability. Therefore, finite thickness for measurement of the resistivity becomes the most important working procedure in chip processing course. The square four-point probe techniques as the important test method in integrated circuit to have an important application, but current four probe techniques still exist some shortage. So this text carried on the research of the following:1,A new neurocomputing method is presented. . Its major characteristic is not need to use the learning rate. As like this simplified computation process, the advantages is easy to compile the computer programming.2,We apply this method to the polynomial fitting for Van der Pauw's function, a quite satisfactory result is finally obtained, making four probe-point mearuement techniques to have usability.3,A thickness correction method for the specimens with a finite thickness for measurement of the resistivity for micro-areas by using the improved Rymazewski method with the square four-point probe is presented. The thickness correction formula has been expressed as a polynomial by the normalized matching. This obtained polynomial was used in the resistivity measurement, so as to simplify calculating course. Finally, the experimental results confirmed the obtained thickness correction formula. This theory has consummated the improved Rymaszewski method for square four-point probe measurement, making four probe-point mearuement techniques to have usability.