The Design And Fabrication Of The Reconfigurable Fractal Antenna Integrated With MEMS Switches

The fractal theory, fractal antenna, the RF MEMS switch and the Reconfigurable fractal antenna with integrated MEMS switches are investigated in this paper .With the development of the modern communication system, there are more and more demands for the miniaturization and multifunction on antennas. The fractal antenna based on space self-filling ability and self-similarity ability, presents some characteristic such as electrically small size, wideband and multi-frequency. With the development of microelectronics, the RF MEMS switch with low loss, high Q number and excellent performance is able to be fabricated, so the reconfigurable fractal antenna integrated with MEMS switches is be possible. In this paper, the characteristic of the fractal antenna is analyzed, the performance and fabrication of the RF MEMS switch and the reconfigurable fractal antenna are discussed, and give the whole fabrication process of the antenna, which is integrated with RF-MEMS switches and fed by the CPW, and then made the antenna on high impedance silicon and quartz.The main work and innovation in this paper are followed:1. Present the design method of RF MEMS switch, and design a cantilever beams configuration RF MEMS switch, then manufacture it with the microelectronics equipment.2. Design the frequency reconfigurable fractal antenna working in the band of 2-20GHz, the fractal antenna combine Sierpinski fractal and Koch fractal, and fed by shade CPW that convenient for probe testing and SMA testing. The reconfigurable antenna use RF MEMS switches with cantilever beams configuration to achieve frequency reconfiguration, and then manufacture it with the microelectronics.3. Give the detail microelestronics manufacture process of the reconfigurable fractal antenna, and analyze the cause of several failing slice and the key technics. At last,we test the switch's on-off voltage,and the antenna's s11-parameters with no biasing voltage.