Study On Temperature Control System Of High Vacuum Magnetron Sputtering Machine

Temperature control of high vacuum magnetron sputtering machine plays a very important role in the process of coating,and temperature control has a direct impact on the quality of film. This paper studied the experts PID algorithm principle and realization method, and applied it to the temperature control system; made a simulation comparison with conventional PID algorithm and experts PID algorithm in the application of temperature control;designed a high vacuum magnetron sputtering machine temperature control system based on expert PID algorithm.,which was composed mainly by the experts intelligent PID temperature controlling device, anti-parallel thyristor modules, thyristors control circuit, thermocouple,and other components; The structure,principle and characteristics of the temperature control system and its unit were also discussed. The results of experimentation shows that the temperature rise curve of self-designed temperature control system can well inosculated with the curve of experts PID ,and can fully meet the use of temperature control requirements of high vacuum magnetron sputtering machine, which can be put into use.The paper also designed an assistant temperature control system which used Solid State Relay directly triggered by temperature controller in order to meet different application needs and expatiate its principle in brief.