Research Of Optics Component Damage Inspection

Dark- Field Image Inspection in optic component damage on high power laser system is the main method of the optics damage in Inertial Confinement Fusion (ICF). In this thesis, first the demand in inspection damage system is pointed out. Then, we simulate simple damage inspection experiment, and collect the damage image for compare. The feasibility of this method is analyzed, and kinds of methodological amelioration conceive after researching experiment and analyzing error is advanced. Based on theoretic, a new algorithm is proposed for dark-field imaging to be used to inspect online optic component damage. The experiment validates that this algorithm is effective. At the same time, we consider another requirement in dark-field damage inspection. After comparing with the damage image, we find out that the diaphragm has great effect in transmission measuring beam. So, we analysis and calculate the popular cutting high frequency diffraction diaphragm. It includes ripple diaphragm and Gaussian soft-edge serrated aperture. We advance those theory and parameter, and design for cutting of diffraction diaphragm.Laser inertial confinement fusion is a high technology program in the world. Optics component damage inspection is an important research task in high power laser system at present. In this article, the main work and obtained results can be summarized as follows:1. Dark-field image processing technology is developed in damage component online inspection system, and its feasibility is analyzed.2. A new algorithm which can be used to automatically recognize damage flaw is proposed in this thesis.3. The new software for analyzing damage flaw is designed by us. The size of damage spots can be recognized with this new damage analytical and distinguishing software. It can provide fault diagnoses in time.4. Some research in long distance beam transmission of cutting diffraction is developed. The feasibility of design using multi-filter for cutting diffraction is discussed. And the estimate of beam quality is already used to analysis the filter for optimizing it. According to these researches, it helps for detecting optics component damage in high power laser system. For application in laser engineering, our results provide valuable reference to design inspection damage system.