The Improvement On The Facility Process Related Systems

What Facility Gas system, Chemical Dispense System(including Slurry System) and UPW(Ultra Pure Water) System supply to Clean Room tools will contact the wafers directly, so they are called Facility Process Related Systems. The stability of Foundry manufacture is greatly depended on the stability of Process Related Systems, so in modern Foundry, the construction cost of them is more than 50% of all facility construction cost.The paper is based on the author's experience in 8 inch and 12 inch Foundry, will not only introduce the structure but also try to give answers to some key problems in UPW & Chemical systems as follows,(1) Water saving in UPW systemCompare to the traditional emphasis on Water Reclaim Rate and take actions around it, the author pointed out that water saving should be UPW-system-wide or facility-system-wide. We should have the water saving in mind from the beginning design stage to finial system operation stage. The water saving methods are divided into 4 kinds, first is on water-saving process, following is on Regeneration waste water reclaim, third is on other drain reclaim to UPW system and forth on operation waste water reclaim. If use the methods mentioned in these four directions, we can save water volume 703 m3/day in summer and 683 m3/day in winter in a Fab UPW system design capacity 90 m3/hour and the reclaim rate can be raised from the traditional 65% to 71%.(2) The improvement on Chemical Dispense SystemBecause chemical system has close relation to production line, we focused on the improvement on monitor system and system stability. So the first method we proposed was to find the false chemical request signals and stop supply chemical to such requests; The chemical request time monitor software written by author was the second improvement suggestion, which could be used in chemical operation work; And finally, the author suggested to use barcode to input the 25%DEV detail concentration to control system and it could reduce the DEV dilution system circulation time and enlarge system capacity. Now the proposal was under patent application procedure and have gotten the serial number.All conclusions and studies on facility process related systems are to bring much significance for our Foundry construction and industry's healthy development.