Research And Development Of Dose Control Board Firmware Based On Digital Signal Processor

In order to improve our country's independent development and innovation ability of strategic equipment in semiconductor chip manufacuring, the real-time Dose Control Board (DCB) in the Illumination Project Control subsystem is developed on the basis of deep analysis of the framework and principle of step-and-scan lithography. All the related research activities are supported by the National High-Tech R&D 863 program of China.DCB firmware is stored in a read-only memory unit of the board, it controls all the hardware of DCB.Its main task is controlling the exposure dose by using high performance dose control algorithm.Its objective is delivering accurate laser pulses energies to wafer at right time. The thesis comprises 3 parts.Firstly, functions of DCB firmware are described. Dose control is the most important task, other key functions of firmware are gathering Beam Measuring data during exposures, laser interfacing and controlling the Variable Attenuator.Secondly, exposure dose control technique in step-and-scan exposure system is discussed.Dose control principle for step-and-scan system is analyzed.A pulse-to-pulse dose control algorithm is proposed.Experiment results indicate that this dose control algorithm meets the requirement of 100nm lithography.Lastly, DCB firmware is implemented based on the TMS320C6711 Digital Signal Processor.Every module of firmware is described, detailed pseudo-codes or flow charts are provided.At last, driver, firmware and hardware are tested together. The integrality and performance of firmware are certificated.DCB firmware has been checked and accepted by Shanghai Micro Electronics Equipment CO.LTD in December 2005.