Workflow Based Discrete Event Simulation Engine For Semiconductor Manufacturing

A new discrete event system simulation theory is intruduced in the paper and the discrete event simulation engine(DESE) software is implemented based on it. The new theory based on workflow theory and the new model of the discrete event semiconductor manufacturing plant is decoupling the relationship of manufacturing device, program and buffer in the semiconductor plant. The new model simply the practical semiconductor modeling and also more close to the theoretic scheduling algorithm which usually design to support only one buffer. Compare with the common commercial simulation software, another difference of the DESE software feature is product process model and phisical model are seperated. So the DESE model is more close to the real semiconductor manufacturing: semiconductor plant has many process flow to build the different product at the same time. The software simulate speed is slower due to all the dynamic buffer, so a new simulation optimization algotithms called揝ection Boost□is invent. The DESE in Section Boost mode can run 150% faster than normal mode, in the extreme condition DESE even can reach 360% faster.