Variation Capacitor Two Dimension Acceleration Sensor Of Ring Style Beam

The accelerometer is based on Newton's second law of inertia (F = Ma) design derives from the widely used for inertial navigation, inertial guidance and inertial measurement system. End of World War II, the Germans developed the first integral gyro-accelerometer, and the world's first successfully applied to a V-2 missiles, thus opening up the inertial navigation, inertial guidance and inertial acceleration of the development of history and become a technology development milestone in the history of the one. After the war, because of the needs of the Cold War, the acceleration of research and development has been growing rapidly. A 1950s-type flotation gyro accelerometer; Starting in the mid-1960s, the development of liquid floated accelerometer, Flexible tilting servo accelerometer, followed by electrostatic accelerator, vibration beam accelerometer; Based on the above 70 age principle of the introduction of new structures, new materials and new technology, the accelerometer attributed; In the 1980s, MEMS technology of the rapid development that led directly to the micro-inertial sensors there, provides an acceleration of the development of a new mentality, habitual history of the development of technology is a milestone.Micro-electro-mechanical system as a micro-nanometer science and technology as a major study, its purpose is the development of material and the potential of information and structure potential,in unit volume of material storage and processing of information capacity to achieve another leap in the information, materials, biology, medical, and other will lead to understanding human capacity to transform the world and a major breakthrough, so as to the national economy and military capabilities have far-reaching implications. Therefore, by the United States, Japan, Russia and European countries attach great importance to have invested heavily in research.MEMS (Micro Electronic Mechanical System), also known as micro-electromechanical systems, or MEMS, in microelectronics technology and silicon micromachining technology developed on the basis of a multidisciplinary cross-emerging disciplines. At present, microelectronic mechanical systems have not accepted definition, it is generally believed that the microelectronics technology is widening and extension It microelectronics technology and precision machining technology integration, Implementation of microelectronics and micro-mechanical integrated mechanical system. Including micro-mechanical components, micro-sensors, micro actuators and the corresponding circuit. Compared with traditional MEMS devices have many advantages, including : miniaturization﹑facilitate the integration of large-scale manufacturing.Structural Dynamics Analysis for solving the time-varying load on the structure or components affected. And static analysis, dynamic analysis with time to consider changes in the power load and its damping and inertia effects. ANSYS be a structural dynamics analysis types include : transient kinetic analysis, modal analysis, harmonicresponse analysis and random vibration analysis. In practical engineering, the structure was affected by the permanent loads, it will also be large or small the dynamic loads. Usually, when the load changes slow structural change cycle than the natural cycle, the dynamic response is very small and It can be as static load handling. Instead, those changes intense, dynamic role in the significant load must consider structural dynamic response.By learning the common acceleration sensor design model Based on Newton's Second Law and variable capacitance area of the plate design, the paper employs variable size differential capacitance structure. This structural-range, anti - Shock to a modest sensitivity and process easy. The structure through movable mass induction acceleration, use parallel plate capacitor to mass displacement of the relative change of capacitance changes through the circuit will detect small changes in capacitance for its conversion directly proportional to the voltage changes. In this structure Theory, International popular finite element analysis software ANSYS capacitive accelerometer on the simulation. The simulation, we can know in advance designed by the acceleration sensor in the actual work of some of the problems We make the design more mature. In particular, the modal analysis, we can find the structure designed by the natural frequency, When the structure of the natural frequency of frequency equal to their work, have a resonance phenomenon, This will greatly increase the sensitivity of the structure.In this paper, based on the ring style beam two-dimensionalvariable capacitive acceleration sensor structure and the design parameters of the design, CMOS-MEMS technology for the manufacture of the largest acceleration sensor range of up to 70 g, with a strong anti-jamming capability lateral acceleration, a lot of way to meet the acceleration sensor works of the basic requirements, theoretically can achieve its function.