A Study On The Microwave Chemistry Reactive System Based On Rectangle Wave-guide

Multifarious systems for microwave chemistry reactor come forth with the development of microwave chemistry. The microwave chemistry reactive system based on the rectangle wave-guide is studied, which is important to understand the performance, to improve the reliability and stability, and to improve the efficiency of the system. In addition, the electron temperature and density of plasma under one condition are calculated by the research and measure on the elementary parameter of plasma, which is important to understand the characteristic of plasma. Finally, in order to determine the pressure of the vacuum subsystem, the commonly rule of the gas flow is analyzed, the basal tool to measure pressure is introduced, and the pressure is determined by the linear chorology.The paper begins with a brief introduction of the development and virtue of microwave chemistry in Chapter 1, the frame of microwave chemistry reactive system is presented. The structure of the paper is presented.Chapter 2 discuses the cells of the microwave chemistry reactive system, and then analyses the material element, which includes these sides: the action and structure of the ring road ware, the theory and main parameter of it; the technology parameter of the high power microwave variable attenuator; the structure and action of the match load; the theory and technology parameter of the beamed coupling ware. All these delimitate the theory and technology parameter of the microwave chemistry reactive system, and are beneficial to improve the reliability and stability of the system.Chapter 3 introduces the structure and frame of the microwave chemistry reactor based on the rectangle wave-guide. The field of the main mode of rectangle wave-guide and the feasibility to design microwave chemistry reactor based on the rectangle wave-guide are analyzed; the field and parameter of the rectangle resonance cavity is analyzed; and the way to design the reactor by software is discussed. All these are beneficial to improve the stability and efficiency of the microwave chemistry reactor.Chapter 4 introduces the basic concept and characteristic of microwave plasma, and then discusses the parameter and measurement of plasma. The electron temperature and density of plasma under one condition are calculated by Longmuir probe. The effect relative dielectric constant of CH4 plasma produced by microwave was firstly calculated with the density of plasma measured by Longmuir probe, and then H2 plasma produced by microwave was calculated by a new method, which was combined with experimental measure and HFSS(High Frequency structure simulation) simulation. Finally, the two means are compared and analyzed.Chapter 5 spreads around the pressure measurement of the vacuum subsystem. The parameter and the determine of vacuum are introduced. The commonly rule of the gas flow is analyzed. The basal tool to measure pressure is introduced, and the pressure is determined by the linear chorology.