Simulation And Scheduling Of Re-Entrant Semiconductor Product Line

The scheduling of the semiconductor product line, which is an important part of the manufacturing system, is closely related with the efficiency of product line equipment and efficiency of the product line. There is much schedule in a group of tasks, thus, how to evaluate whether the schedule is good or bad is realized through simulation.Semiconductor manufacturing system is a class of complex manufacturing system with re-entrant being its feature. Because of the re-entrant, equipments are shared by many lots even though they may be at different stages of their manufacturing life. As a result, lots strive to the access to the equipments and the waiting time prolongs accordingly. It is hard to solve this problem by single scheduling strategy. An effective way is to integrate all sorts of control and scheduling strategies and make use of discrete event dynamic simulation (DEDS) to evaluate whether the schedule is good or bad. Based on the intention, the simulation of product line is developed to solve complex semiconductor production workshop scheduling...