The Development Of Four-degree-of Freedom Measuring Apparatus Base On Single-mode Fiber-coupled Laser Module

The straightness and angular error of a machine guide are main factors to assure high quality of mechanical components in the precise manufacturing. Interferometer measuring is a conventional way, but only one parameter measurement can be supplied once. The approach of multi-degree-of-freedom measuring is a hot subject.A four-degree-of-freedom measuring device is developed in this thesis and will be the base of the six-degree-of-freedom measurement. The single-mode fiber-coupled laser module is used to decrease the laser beam drift, and the high accurate and stable measurement reference can be obtained. A cube-corner retroreflector is used to reduce the volume of the device. The quarter detector (QD) and the position sensitive detector (PSD) are used. The measuring data is collected and processed though the Single Chip Microcomputer. There are some advantages of simple structure, easy operation, high accuracy and real-time work in the device. The device can be used in the long distance measurement because of non-cable connect in the moving gauge head. Specially, this apparatus is cheaper than the same apparatus abroad.These works are accomplished in this thesis including the optical structure design, the circuit arrangement, the measuring software development and the overall test. The accuracy of the system is 1μm for the straightness measurement in the range of±800μm, and 3" for angular error measurement in the range of±600".