The Study On The Design And Fabrication Process Of MEMS Vibration Sensor

Aiming at the lower cost, high sensitivity and high integration micro vibration sensor, the basic researches on the design and fabrication process of polymer micro-opto-mechanical vibration sensor based MEMS techniques are done.The advantages of polymer micro-opto-mechanical vibration sensor are pointed out basing on the reviewing and comparing of the development and status of the sensor and its material, and then the necessity of research on this sensor is explained.In this paper, the micro-vibration sensor chip which is integrated with the waveguide-cantilever-mass is designed, optics-mechanics transform principle is explained, and the waveguide parameters are calculated. The affection of structure parameters on the sensor property and the basic rule of the parameters'selection are analyzed particularly. At last, the optimum results of structure parameters are given.At the same time, the fabrication process of polymer micro-opto-mechanical vibration sensor chip is investigated deeply. The spin coating process of PMMA membrane is studied, and the surface-quality problems such as the dissolve among layers, stress crack and lithography crinkle are solved. Polymer lithography, masking preparation and polymer dry etching process are researched, the process difficulties such as lithography penetrate fret, and lateral erosion in dry etching are settled. As a result, the fabrication process of polymer micro-opto-mechanical vibration sensor chip is summarized, the integrated structure of optical-waveguide and cantilever-mass is implemented on silicon substrate, and the prototype of polymer micro-opto-mechanical vibration sensor based MEMS techniques is fabricated.The fabricated sensor chip is tested preliminarily by the end to end coupling...