Research On The Depth Measurement Of Micro Channels Of Micro Fluidic Chips Based On D.F.D.

Micro system has already applied in all kinds of vocations and researched extensively at present. As one of the most important embranchment of Micro System, the inspection of micro component is closely linked with the development of Micro System and supplied each other. It is the main means to understand the MEMS and the most important approach to verify the successes or not of Micro System. The inspection technology and the inspection equipment are in control by few countries such as Japan and Germany, and the safeguard of technology is very strictly, at the same time, the equipments are expensive. So many our peoples in this vocation are only the operator who can only know how to use the equipment and the related software. So it's necessary to take a research on this subject. Micro fluidic chips are a special use of Micro system in modern medicine and analysis chymistry. Micro fluidic chips are made in batchs in our country now, but it is necessary to inspect the Micro quality of them as we can make them used widely.The depth measurement of micro channels is one of the most important task in the inspection of micro fluidic chips.Make a study on the depth measurement of micro fluidic chips based on D.F.D.(depth from defocus) is a try, but the result of the experiment proved the method is effective and give a new way to inspect the dimension of micro components.Content of the dissertation:The main content of the dissertation lies on the two aspects, the one is how to collect the digital imaging by the digital microscope with high multiples, the other one is the processing of the collected digital imaging, combined with the moment-preserving and the principle of D.F.D. to calculated the depth of groove of micro fluidic chips.Chapter 1, after given the systemic discussion of theory and the development status of micro system, give a description of the inspection methods and their principles.The shortcoming of them is put forward. In the following put forward the meaning and the background of the dissertation and the concept of computer vision. At last, the arrangement of the chapters is given.Chapter 2, give a summarization of the principle and the method of its carry out of the D.F.D. technology, the traits of all these methods is analysis.Chapter 3, according with the principle of the D.F.D. technology, the scheme of the depth inspection is designed, combined with the digital imaging processing and moment-preserving technology, we can calculate the depth of the groove of the micro fluidic chips.Chapter 4, make a thorough research on the digital imaging processing of the collected photo, give the related code of the processing, and get the result of them.Chapter 5, according with the scheme given in chapter 4, make a flow sheet of the calculation of the depth of the micro fluidic chips, and experiment many times and get the depth as results at last. Put forward the sources of error and the ways to reduce the error in the following paragraph.Last chapter, the important results and conclusions of this dissertation have been summarized and the prospect for the application of D.F.D. technology has been opened up.