Study Of The Gas Sensor Of Phthalocyanine Oganic Semiconductor

With the developing of modern industry, electricity generating industry and automobile trade, the combustion of various fuels and the construction of chemical plants emit a lot of toxic gases into the air. So it is urgent to solve the problem that how to test and control the low concentration toxic gases, and the study on the sensor of monitoring Cl2 gas in the atmosphere is significant.Now gas sensor is being studied on inorganic semiconductor, electrochemistry and so on, but there are many problems of complex means, high cost, low precision etc. However, because organic semiconductor has the advantage of abundant material, low cost, simple technics of making film, being prone to consisting with other technic, working in normal temperature etc, it has become the hotspot of study. The development of organic semiconductor and film technology provide advantageous pledge for developing new-style gas sensor.Chemical compounds of phthalocyanine was the main synthetic materials in this paper. The exactness of the synthesizing method was identified by analyzing the mass spectrum and energy spectrum; an ideal conductivity was obtained by mixing the material of phthalocyanine properly; plane fork electrode was prepared by using the tiny fine machining technology; a sensitive membrane was formed on fork electrode by means of vacuum plat film, daubing and dip-coating technology, and the analysis of SEM shape indicated that the size of the membrane particles were equalized. Gas sensitivity film is prepared in vacuum sputter coating,dip-coating and smearing film techniques. Vacuum sputter coating has better stability than smearing film while smearing film has better response electric characteristics than vacuum sputter coating. After mixing, the phthalocyanine compound's conductivity is visibly improved. Through vacuum sputter coating the resistance can descend to 109? below, becoming semiconductor. Crude copper phthalocyanine (has not been purified) smearing film is preferably in electric characteristics, and it has better gas sensitive...