| The diffusion silicon pressure sensors are made of semiconductor materials which are sensitive to temperature. The non-linear property of pressure sensor is influenced by the piezoresistive-resistance coefficient in practical applications and the piezoresistive-resistance piezoresistive coefficient is a function of temperature. The thermal offset drift of pressure sensor is caused by the non-equality distributing of the temperature of the sensor configuration. Temperature is the main factor that affects the measurement accuracy. There are many methods of temperature compensation for sensor that can be summarized as hardware circuit compensation and software program by using intelligent chips or microcontrollers according to realization condition. The software program compensation is superior to hardware circuit and makes accuracy higher but cost lower. Diffusion silicon resistor-bridge is the core elements of an intelligent pressure sensor. This sensor can acquire and revise data automatically, besides, it can transmit, receive and display the data punctually and exactly. This paper will get an analytical expression with temperature information by polynomial matching technique to fuse temperature information, and write it into intelligent chip by programming. By this means, we can realize pressure sensors to be revised by itself and to be compensated by itself.The technology of wireless data transmission is adopted in actual application of data acquisition. Its system is made of the wireless transmit and receive module via wireless channel. The single chip can control data coding, communication protocol, transmission and receiving etc. Furthermore, this wireless data acquisition system for intelligent pressure sensor is low cost, reliable and high practicability. |
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