The Study Of The Multifunctional Microsensor

The displacement measure has been widely used in mechanical engineering.It is not only because that we often need measure the displacement or location of components accurately in mechanical engineering,but also many measure methods about the parameter of force,pressure,speed,temperature,flux and so on are baced on the displacement measure. In different displacement sensors,strain displacement sensor has high precision,good stability,wide use areas and also has the mature manufacture technique. So it is one of the sensors that have been widely used at present.This paper mainly focuses on the characteristic that the strain sensor measures displacement,analyzes the key factors that affect precision and resolution,stydies the methods that can improve precision and make the volume micromation. According to the research at present and the requirement of project,the paper finishes four aspects of research below:1. Design the structure shape of the elastomer of sensor. Choose strain gauge.Study the effects of the location of strain gauge to precision.2. Design the experiment device. Make experiment scheme. Make experiments about cantalever and strain gauge.3. Design and study the measure circuit of the sensor. Try the best to reduce the effects of fluctuation and disturbance. Make sure that the circuit has good stability and reliability.4. Design the inner structure of the sensor based on the experiment.Make the volume micromation.