Based On Object-Oriented Hybrid Petrinets Modeling In Re-Entrant Production System

In recent years, because of semiconductor manufacturing boom brought by a high profits and high returns, the best indicator of semiconductor, re-entrant manufacturing production systems become current research focus. In the re-entrant production systems modeling studying, the previous re-entrant produc-tion systems of equipment, which process is complexity, high re-entry, face it the previous modeling often feels helpless. Therefore, a new modeling methodology to model the production system is particularly important.For the features of the re-entrant production, this paper presents an ob-ject-oriented hybrid Petri nets modeling, this model made object-oriented thought and Petri net theory together, it not only content the object-oriented ab-straction, encapsulation thought; but also has Petri nets and graphical rigorous forms expression, so it can successful model the re-entrant manufacturing sys-tem.This paper's main work is as follows:(1)A detailed description of the domestic and foreign scholars in the past for re-entrant manufacturing system modeling approaches and methods used the corresponding analysis of their advantages and disadvantages, which leads to object-oriented advantages of hybrid Petri net modeling and meaning.(2)Such as times, rules, variables, which has been introduce into the ob-ject-oriented Petri net model, a new object-oriented hybrid Petri net model has format, using the model in the typical semiconductor manufacturing industry re-entrant production system--Modeling of wafer fabrication process. In the modeling process, according to the object-oriented thinking, the wafer to encap-sulate the specific process, combined with the related resources and equipment configuration requirements, make partial hybrid Petri net model of ob-ject-oriented; then the local model according to the General process associated with the process requirements in order to build a wafer manufacturing process general model. Using this modeling approach can effectively reduce the com-plexity of the model, greatly enhanced the availability of the model. Finally, check the established nature model of the appropriate, to prove whether the deadlock and established is good or not.(3)The model bases on re-entrant production systems, using genetic algo-rithms to solve their programming, which is first, depending on the situation, list the issues and write mathematical expressions and the solution process, and then use the model represented in the form of code, a set of random virtual resources to run the code, and by running the results of the corresponding gent chart drawn in order to verify the feasibility of the model.