The Design And Realization Of Motion Control Board Based On VME Bus And Its Driver

With the development of information technology, the requirement for integration density of integrated circuit is getting higher and higher, the diameter of silicon chip is increasing, and the width of the graph line is reducing at the same time. Therefore, the requirement for the motion control of the special equipment- lithography is also getting higher and higher. At present, lithography generally takes motion control method of PC machine embedded in the motion control board. It can combine the formidable information-handling capacity and open style of PC machine and the motion control ability of motion control board. It can satisfy lithography's demand for motion control. This thesis aims to provide the effective support for lithography's motion control system both in hardware and software level through developing the motion control board and realizing its driver.Firstly, this thesis makes the whole plan for the hardware of motion control board on the knowledge base of lithography and the technology of motion control as well as combining performance index of it. The motion control board accesses to the PC through VME bus, using VIC068A/VAC068A. The main control chip is DSP TMS320F2812, and the double port RAM is used as connection chip between access chip and main control chip DSP to avoid the bottleneck jam produced by motion control board and PC machine. The motion control board accesses on the driver of linear motion actuator or voice coil motor through D/A and the input output of switch, and then the motion control board make control of it.Secondly, this thesis investigates the realization of hardware circuit of motion control board with the concerning of the plan of motion control board. It includes design of DSP periphery basic electric circuit, like power source, monitor of power source, replacement and simulation connection and so on. It also includes the input and output of motion control board, realization of VME bus interface electric circuit. The characteristic of this motion control board is compact structure and high reliability.At last, the motion control board cannot work without the support of driver. Under VxWorks, this motion control board driver can be realized, and the hard timeliness of VxWorks has further guaranteed the performance of lithography system. To realize specifically, first, the board support package has to be developed according to the system of PC hardware environment. Board support package can shield hardware environment of PC sucessessfully, and provide the fundamental environment for the development and test of driver. Then the driver of motion control board can be developed under VxWorks, with the combination of the hardware environment of the motion control board. The driver of this motion control board belongs to the driver module of character device, and its driver system realizes through standard VxWorks I/O system.