Font Size: a A A

Intelligent Design Of Temperature Compensation Of Pressure Sensor Based On MEMS

Posted on:2011-10-03Degree:MasterType:Thesis
Country:ChinaCandidate:Y Y HuFull Text:PDF
GTID:2178330332972080Subject:Materials Physics and Chemistry
Abstract/Summary:PDF Full Text Request
Abstract : The sensor technology bases on information acquirement and transformation, is the key method to get outside information for human, and provided important evidences for human high-tech development. Pressure sensor made by micro-machining technology and based on the semiconductor piezoresistive effect. With small size, high sensitivity, ease of mass production, pressure sensor acquires wide applications. However, because of the factors of the inherent characteristics of semiconductor materials and micro-machining process, pressure sensor easily affected by temperature, prone to generate temperature drift. This will leads to inaccurate measurement, seriously affect the application of pressure sensor in high precision field.Aiming at the temperature drift of pressure sensor, the current temperature compensation methods are divided into two kinds: hardware compensation and software compensation. Hardware compensation is using the fixed resistors, thermistors such as for series and parallel of piezoresistive resistance or the bridge to achieve temperature compensation. Software compensation utilizes microprocessor to achieve intelligent compensation. Microprocessor is the core device, an appropriate AD is chosen according to requirements of circuit design, and the appropriate algorithm is chosen to achieve temperature compensation. This method mainly based on program to achieve the processing of collected data, it is easy to modify and with high compensation precision.In this paper, the intelligent design of temperature compensation of pressure sensor was presented. We select the Atmega16 as microprocessor, CS5532 as the ADC, DS18B20 as the digital temperature sensor, and select low temperature drift of the components of the entire circuit to avoid additional voltage caused by temperature changes. And the concoid fitting method is taken as the temperature compensation algorithm, which put the two variables of temperature and pressure as the factors that caused the output. Experimental results show that the temperature drift of pressure sensor has been improved, and zero temperature drift coefficient and sensitivity temperature drift coefficient of the pressure sensor has improved 1-2 orders. And achieve high measurement accuracy and improve the performance of pressure sensors to meet the high requirements of application.
Keywords/Search Tags:Pressure Sensor, MEMS Technology, Temperature Compensation, Intelligent
PDF Full Text Request
Related items