Study On The Process Optimization For Data Retention Of Embeded EPROM

In the Fab Plant,data retention evaluation is very important for product qualification. Optimization of process to data retention capability inprovement is a major work for process intergrity engineer of technology development team. Temperature accelerating factor is used during data retention checking to ensure 10 years life time under 85℃. Charge loss mechanisms match Arrenius formular. Active Energy should be a clue to find the failure causes about data retention. Experimental result is the real references for process optimization.Charge loss mechanisms of 180nm EPROM process can be divided into two categories: extrinsic and intrinsic. The data retention lifetimes are typically determined by accelerated high-temperature data retention bake and calculated with the known active Energy(Ea).