Array Defects Analysis And Repair In TFT-LCD Manufacturing

The array defects detection and repair process is the important process of improving the products yield in TFT-LCD manufacturing, and also is the compositive process technology which compounds many techniques like defects detection, repair technique, laser disposal, film character analysis and equivalent circuit analysis.In this paper we make a deep discussion of the disposal technologies for the electrical defects in the 5'th generation TFT-LCD production line and from the defects repair point of view we make a difference between all kinds of defects through focusing its origin, methods of detection and disposal. By analyzing related process of production, detection and repair machine's struction, film materials, pixel design, equivalent circuit and design of experiment, we bring forward a practical and comprehensive defects detection and laser repair's method, especially made an innovative approach for certain key defects detection and repair, to enhance the restoration range and effects, thus ultimately effectively improved product quality and yield.Most of the results of this research have been used in 5'th generation TFT-LCD production line, improve the yield effectively and achieved good economic results, and make practical references for the in-depth exploration and development of the China's TFT-LCD manufacturing process, defect detection and repair technology.