An Application Research Of Nano-positioning Stage Controller Based On DSP

With the development of modern science and technology, nano-positioning system is needed more and more urgently in many areas, such as fiber-optic connection, ultra-precision machining, micro-surgery, SPM system, test of micro-electro-mechanical systems, semiconductor plate precision positioning etc. The piezoelectric actuator is a perfect micro-positioning drive element. Because of its good performance, it was broadly used in applications that require precise control. However, the position response of piezoelectric actuator shows strong hysteresis, creep and nonlinearity. These defects make it difficult to control. This dissertation employed piezoelectric actuator to drive a micro-positioning stage, piezoelectric positioning stage controller is the key component in the micro-displacement system, and is paid attention more and more by research community home and abroad. But The existing PZT positioning stage controllers adopted microcontroller as the core processor generally, because of its high power dissipation and low efficiency, microcontroller can't conduct real time control,and integrate more functions. To improve the positioning performance, the following aspects have been studied.For the problems above, this dissertation adopted the combination of technology of DSP and Electron-Design-Automation to design this positioning stage controller. At first, the circuit principle chart was designed; Secondly, the bottom software and application software were designed inline with practical and convenient principles; After that, to eliminate the hysteresis, creep and nonlinearity of the piezoelectric actuator, the parameters self-turning fuzzy PID control method was developed. Its control conception and principle were described; Finally,an experimental setup of piezoelectric actuator was designed, which included this controller, piezoelectric actuator driving power, micro-positioning sensor etc. The experimental results indicated the system had good static and dynamic characteristics, and can achieve a position of 10nm precision within a certain distance by using parameters self-turning fuzzy PID control.This controller has many advantages, such as the high precision,quick response , good stability , simple structure and convenient debug. Still it contributes a lot of the research of positioning system. This dissertation will provide theoretical and practical experience.