Research Of High-precision Displacement Control Method For Piezoelectric Ceramic Actuators

As the rising of MEMS (Micro Electro Mechanical System) technology, micro world ispaid close attention by people, and micro-nano technology becomes the research focussubsequently. The micro-nano drives with high accuracy and stability are urgent needed inthe field of microelectronics and precision machining. As piezoelectric ceramic material hasthe advantages of fast response, small size, large driving force and high accuracy, it is anideal micro drive and applied in the micro-nano positioning and drive system. Whereas thehysteresis of the piezoelectric ceramic could have an affect in the drive system performance,and it is the urgent problems in the field of micro-displacement positioning.The paper introduced development overview of piezoelectric ceramic and actuators,described research history and current situation of the piezoelectric ceramic material,analyzed the control method of piezoelectric ceramic actuators and the hysteresis nonlinear,summarized and analyzed the dynamic hysteresis modeling and control method ofpiezoelectric ceramic actuators. And the establishment of the piezoelectric ceramic actuatorhysteresis nonlinear control laid a foundation.To achieve the control to the input–output hysteresis nonlinear of piezoelectric ceramicactuators, the Duhem model is chosen as the hysteresis nonlinear model of piezoelectricceramic actuators. And utilizing the recursive least squares algorithm and gradientcorrection algorithm to identify the parameters of Duhem model and establish the model.The paper establishes the Duhem hysteresis nonlinear inverse model of piezoelectricceramic actuator based on the Duhem model, and utilizes the established hysteresis inversemodel as feedforward controller to conduct the feedforward open loop controlling topiezoelectric ceramic actuators and the result is satisfied. To further improve the controlaccuracy of piezoelectric ceramic actuators, we add the PID control based on the open loopcontrol and conduct experiment of inverse model feedforward PID control.Through analyze of the self-adaption control and sliding variable structure control, the adaptive sliding variable structure complex control scheme is adopted to control thehysteresis nonlinear of piezoelectric ceramic actuators. Comparison with inverse modelforward PID scheme, the adaptive sliding variable structure complex control scheme couldachieve a better control accuracy to the hysteresis nonlinear of piezoelectric ceramicactuators.