| This paper introduces a new illumination system aiming to observe 3D microstructure of MEMS. It can illuminate from three directions. Its light intensity, angle of incidence and distance of incidence can be real-time regulated precisely. Three-dimensional image and the surface of microstructure can be achieved clearly by using this system. In the process of designing the surface matrix CCD micro-measurement system, calibrated error has a direct effect on the measurement accuracy of the system. In order to calibrate and reduce calibrated error, a new method is provided in detail , which is simpler, faster, more convenient and more applied than the traditional method. The calibrated accuracy of the system is up to ±0.0015μm and its measurement accuracy is up to ±1μm. This system is suitable for calibration in the level of micron. MEMS(Microelectronics Machine System) is a compositive system which has such functions as sensor, info processing and execution. It has been a hot point in many important high and new technology fields. The characteristic size of MEMS components is from micron to millimeter. The main components include cantilever girder, micro bridge, filament and micro axletree etc. The micro component is different from the macroscopical component. Its force character changes a lot when its size is to micron or nanon. The general material force character can't be used to explain the force character of the micro component, so it is very important to test the force character of MEMS material. The experiment on micro-column proved the reliability, stability, and portability of the system. After a little adjustment, the USB device can replace the motor control card or data acquisition card completely and can be widely used in such fields as monitoring, measure-control, and so on.
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