Preparation And Experimental Research Of PLD Multilayer SPR Biosensor

With the great development of film preparation technology, optical film has gained a great progress, it has been used in the field of optical communication, optical message and optical detection, especially in the aspect of optical sensors; its advantages have drawn attentions of a lot of researchers over the world. In this paper, a new method to enhance the absorption sensitivity of a sample by utilizing metal-clad ZnO optical film wave guide configuration to replace single metal film in SPR sensors is proposed. This paper can be divided into three parts:First, the ZnO film is prepared on the bottom of prism with the PLD (pulse laser deposition) technology which is evener than that is prepared by traditional method and the optical and crystal characteristics are detected by SEM and XRD technologies.Second, the film thickness and refractive index of ZnO film are measured by the m-line method, which provide experimental parameters for the design of the multilayer SPR biosensor.Third, the multilayer SPR sensor design is introduced, the experimental setup is based on the configuration of the attenuated total reflection (ATR) method. The detection mechanism is analyzed theoretically; the numerical calculation results show that the multilayer SPR sensor exhibits a great sensitivity enhancement and high resolving power.