| Adaptive Optics technology is a new technology in recent years. As a technology who connected with optics, machine, electronics and computer, it has the excellent performance beyond the conventional optical system. And it has a wide application foreground in military affairs and popular area. A very important research area of adaptive optics is dynamic Shack-Hartmann method. And the main component for Hartmann method is Hartmann wavefront detection arrays. Its nuclear part is microlens arrays made by binary optics. Microlens arrays determine the Hartmann wavefront detection's capability. Through the conventional adaptive optics theory, we analyze many Hartmann wavefront detection methods and the main technology parameters in the world. We give the experiment and design research project of the Hartmann microlens arrays by the special demand of this subject. We use ion erode technique make microlens arrays,confirm the parameters, study interrelated detection instrument and performance parameters of microlens. We also take computer software simulation. Finally this subject was checked by National General Equipment Department and passed. The thesis is composed of seven chapters. Chapter One mainly introduces the source, and significance of the project, and expounds on the studies in the field both domestically and internationally. Chapter Two makes sure Hartmann microlens arrays design, experiment theory and method. Chapter Three gives academic and actual factors that influence detection precision of microlens arrays, and ensures material parameters in this subject. Chapter Four discusses the hardware selection and interrelated detection instrument. Chapter Five makes software simulation. Chapter Six analyzes the result of experiment. Chapter Seven gives the summary of the whole thesis. Also some suggestions are proposed to solve the existing problems in the system.
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