Design Of Pressure Sensor Compatible With CMOS Process

Pressure sensors have lots of application fields, integrated pressure sensor'sreseach and development widely promote its application, the research status on several kinds of pressure sensor is introduced in the thesis.One integrated piezoresistive sensor compatible with CMOS process was designed in this paper. Firstly, The principle and design of piezoresistive sensor was discussed in detail. Analytical models based on small deflection theory was applied to predict the sensitivity of piezoresistive sensors. Then, process of piezoresistive sensor was introduced. Finally, the piezoresistive diahpragm is simulated with ANSYS software, and the results are also analyzed. The results indicate that the piezoresistive diaphragm as sensors has good performances.