Research Of The Temperature Autocontrol Based On The Immune Feedback Mechanism

Supported by the Commission of Science Technology and Industry for National Defense, this paper describes the design of the MOCVD temperature control system. In theory, on the basis of understanding MOCVD technics and the studies of time-delay system, we design the part of temperature control. And after the study emphasis on immune, artificial immune, immune feedback mechanism, a thought of temperature control based on immune feedback mechanism is presented, and then the controller does. In practice, at first, closed-loop control of system temperature is realized; then, approximate curve diagram of system temperature and corresponding voltage has been gained, and further approximate transfer function model of system time-delay. Then, concrete error reference function has been confirmed to search for the optimum control parameters. Finally, the control algorithm is realized, and further develops to three control models for operators to choose. All proof indicates that the developed control algorithm is superior to traditional PI control algorithm.