Research On Applying Computer Vision In Micro-component 3-D Inspection

Based on the National 863 high technology research and development plan(2002AA421150), the technology of computer vision micro-inspection is studied in this dissertation. By applying the technology of computer stereo vision on the 3-D inspection of the micro-component. We successfully design and develop the prototype of the 3-D micro-inspection system based on computer vision, which can inspect 3-D surface of micro-component.At first, the dissertation introduces the research actuality and trend of the technology of computer vision at home and abroad, and it summarize the inspection system based on computer vision and the application. The task of applying computer vision on the 3-D inspection of micro-component is put forward and the research significance of the task is explained. Main contents and general structure scheme of this dissertation are presented.In chapter 2, the essential system structures and general developments of the computer vision system are introduced and the problems and their solving means in the research are presented. The research field and development direction of computer vision are summarized.In chapter 3, the basic principle of the technology of computer vision inspection is introduced and several important methods of computer vision 3-D inspection are summarized. Then the key technologies on the hardware and software of the computer vision inspection system are studied. The application of the technology of computer vision inspection is summarized.In chapter 4, based on the principle of computer vision micro-inspection, we design the computer vision micro-inspection system for the 3-D inspection of micro-component. The system has three subsystem: controller optics vision and image processing. The hardware of the system is briefly introduced and the software of the system is presented in detail.In chapter 5, the key algorithms of the computer vision 3-D micro inspection system are studied. The algorithms of system calibration, image matching and correction of lens aberrance in system calibration are introduced in detail.In chapter 6, the 3-D micro-inspection system based on computer vision is developed according to the design scheme. The experiments of 3-D inspection of micro-components and system error analysis are implemented. It is indicated in the result that the system can do 3-D inspection of micro-components work successfully and the system error is low enough to meet general inspection need.At last, all of the work in this dissertation is summed up. The future research of computer vision 3-D micro-inspection is prospected.