Research On The Micromachined Gyroscope Electric Field And Its Piezo-electricity Coupling

The dissertation Research the new type of Micromachined Gyroscope with Micro-electro-Mechanical system dynamic. The micro gyroscope's drive type and the actuation structure and studied the computational method of driving influence by electrostatic force were discussed in the dissertation. The paper carried on dynamics simulation and piezoelectricity coupling.Firstly, this paper constructs the elementary single model of the gyroscope and then uses the FEM software to analyze the primary factor of the electrostatic force, analyzed the electric potential distribution and the electromagnetism density portion. Then, take two groups of combs as the example, studied the change between many group of comb.Secondly, the paper has determined the type of coupling as piezoelectricity coupling, using the FEM software to analyze the movement during the half cycle, funded the Law of motion. The paper has proved that the Law of motion has the relationship with the electromotive input.