The Structural Design And Technological Study Of An Electromagnetic Micromachined Gyroscope

Micromachined vibratory gyroscopes has the merit of small size,light weight and high antishock comparing with traditional gyroscope. It used in civilian areas such as car navigation, as well as inertial guidance for military purposes. MEMS gyroscope technology is the core of gyroscope, so the study of gyroscope chip's design and technology processing is very important and significant. The main content of this dissertation is about design and fabrication process of an electromagnetic vibrating structure micromachined gyroscope. The dissertation use FEM (finite element) to solve the structure of gyroscope because it's easier than to get fitted results. The paper introduces the principle of the electromagnetic micromachined gyroscope and gives the structure of the gyroscope. FEM kinetic equation of gyroscope is elicited, and then analyses of mode,high antishcok,stiffness and Coriolis effect are done. The fabrication of the gyroscope is done by using MEMS technology. The flow of fabrication is decided,and then the gyroscope is implemented step by step. In the end, the chip is tested. These study results provide some design and processing experience for electromagnetic vibrating structure Micromachined gyroscope.