A Study Of The Doubly Decoupled Micromachined Gyroscope Design And Its Characteristics

This paper starts from the operational principle of the current capacitive micromachined gyroscope, then analyzes the problem exist in the micromachined gyroscope which is not decoupled and the single decoupled type based on the mechanical model aspect , and designs a new type of doubly decoupled micromachined gyroscope with the purpose of reducing the mechanical coupling error of the structure, improving the sensitivity of the gyroscope and keeping a certain working bandwidth.Firstly, this paper constructs the elementary 3-D model of the gyroscope and then uses the FEM software to analyze the stiffness of all kinds of spring component in the structure, verifying the rationality of designing. Secondly, this paper analyzes the stress and displacement state of the gyroscope oscillator in the condition of free state, and then analyzes the stress state of the gyroscope oscillator in the limit position, and also calculates the fatigue characteristic of the gyroscope oscillator with the purpose of long-term stable working, and establishes the initial size at last. Thirdly, this paper changes size of the key components to observe the effect to the dynamic characteristic of the oscillator, and then establishes the final size of the gyroscope, keeping the driving mode and the detecting mode of the oscillator matching precisely and a certain working bandwidth. At last, this paper also check the static condition of the gyroscope oscillator, and analyzes the stress changing when oscillator is in simple harmonic vibration, and researches the response along the different directions of the oscillator when it is driven by the sine electrostatic force, by doing the transient dynamic analysis to the oscillator.The research of this paper can make a reference for the mechanical microsensors designing, and supply a new way for research on the doubly decoupled micromachined gyroscope structure, and do a certain foundation job for the further research on the characteristic of gyroscope under multi-physics effects.