A Preliminary Design Of The Silicon Flexural Accelerometer Based On Plane Helix

The silicon flexural accelerometer, which is the most important component of the inertial navigation system, is used abroad on navigation and spaceflight field, traffic and transportation field for its little cubage, fast response, high sensitivity In the recent several years, our country acquired rapid progress in the weapon research field especially in the short range guided missile, carrier rocket, new celerity intercept weapon and so on. As the kernel components of the inertial navigation system, our country's silicon flexural accelerometer still depend on the copy the West's advanced products, at the same time, there are many pivotal technics that we can not do well, the performance of our own products is dropped behind the replicated products very much. It's very valuable to lucubrate the silicon flexural accelerometer, for the independent development of our inertial navigation technology.The mostly work of this task is investigating the problem of long-term stability in the presently conventional silicon flexural accelerometer and designing the new silicon flexural accelerometer based on plane helix's whole fabric and manufacture technics, designing the serve control system circuit, assembling the sample machine and testing it.The thesis is composed of six chapters as following:Chapter 1 summarizes the development actuality and the existent problem presently of the silicon flexural accelerometer, the objects and tasks of this thesis are also put forward on the foundation above.Chapter 2 detailedly expatiates the whole designation scheme of the new silicon flexural accelerometer based on plane helix by strictly analyzing the research object and relative key techniques.Chapter 3 expatiates the fabric and manufacture technics especially on the flexure joint, helix printing, magnetic pole machining, magnetic core making.Chapter 4 brings forward the designing method of the absolute component serve circuit by analyzing the conventional silicon flexural accelerometer serve circuit and introduces the performance of this circuit.Chapter 5 expatiates the assemblage of the whole accelerometer system, and introduces the system's performance.Chapter 6 summarizes and expects the research in this thesis.Innovation of this thesis can be summed to the aspects as following:The felt superparamagnetic iron oxide magnetic core used in the new magnetic supporting equipment can enhance the magnetic induction strength effectively, and has no hysteresis loss, but the superparamagnetic material's special characteristics determine the magnetic core's manufacture technics would be very difficult. It's a new apply of the superparamagnetic material in magnetic core. Machining plane helix to replace the conventional moment helix reduces the difficulty of adhibiting technics, and reduces the quality of the silicon flake effectively.