| With the development of the silicon micromachining technique, the silicon accelerometer has already taken up consequence in the sensor market. The development of sensor technology need precision periphery detection circuits. One of the hotspots is the weak signal detection of silicon microsensor's signal. The microminiaturized circuitry is needed to microsensor. The inevitable trend is the integration of circuit.This paper's research on the hotspot of silicon micro-acceleration—capacitance acceleration and the tunneling accelerometer, the weak signal detection circuit were designed, tested and demarcated. In order to improve the detection precision, the acceleration and detection circuit were integrated by the thick film mixture integration technology.According to the comb capacitance accelerometer's sensor mechanics, the difference detection circuit was designed. In order to improve the linearity and measure range, the closed loop feedback control circuit was adopted. The resolution has reached . After joining the capacitance acceleration and the detection circuit, tested the sensor's static state and dynamic character, the result is quite well.The tunneling effect is introduced, which is the tunneling acceleration's detection principle. I did the open loop test of the tunneling accelerometer, which was fabricated by peking university. I did the simulink simulation to guide the parameter enactment of detection circuit. The three-axis tunneling accelerometer were tested and demarcated. To the accelerometer of vacuum package, i has done the PID design and simulation.The circuit integration can minish the circuit volume, improve the circuit performance and stability. The thick film mixture integrate circuit is adopted to integrate the detection circuit and capacitance accelerometer, the material and working procedure were introduced, through testing the integrated sensor, the result shown that the resolution can improve one order.
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