Dynamic Characteristic Testing Equipment For Microstructure Of MEMS Device Under High G Force Acceleration

MEMS device such as Micro-inertial device manufactured by micro fabrication techniques implements its measurement function by the micro displacement or deformation of the microstructure, and thus the performance are decided to a large extent by the dynamic characteristics such as vibration mode and resonance frequencies. The development of the dynamic testing devices has practical significance in dynamic measurement under high load and the study of dynamic characteristics of microstructure with different high G environment.The design of the equipment including electric spindle unit, rotation plate unit, state of rotation plate detecting and analyzing unit, data acquisition and transfer unit and computer controlling unit etc has been finished. High speed centrifugal rotation plate which is used to carry testing microstructure and its electric spindle driving unit has been designed. The stress distributing and the distortion displacements in a high g-force acceleration environment have been analyzed by the software ANSYS and the critical rotate speed and the quiver mode have also been analyzed. The choosing of the electric spindle engine in the driving unit and its technique of frequency conversion and timing have been investigated, to solve the question of rotate speed difference rate existed in the frequency conversion and timing and also compensate it in dynamic testing of microstructures, experiments have been carried out. The design of saving and transfer unit in data acquisition which is used to test device has been finished. The software which is used to acquire data by single-chip in upper computer has been compiled that can acquire, save and transfer data in testing experiments. The analysis unit to the rotation plate has been established and the hardware platform has been built to detect, acquire and analyze the signal. The signal detecting and analyzing software has been compiled. In the speed range 600-7200 rpm, the work characteristics of the rotation plate has been investigated in experiment. The testing device software basing LabVIEW has been exploitured. It mainly achieves the control of the Microstructure dynamic testing system and the signal analysis.The developed system provides an effective means for the high G force micro-inertial device dynamic testing, and the dynamic testing of MEMS microstructure method under high load was explored.