The Study Of The Vector Hydrophone Based On MEMS

The design and the technology of little low-frequency resonant vector hydrophone is described in this paper. The shell of this kind of resonant vector hydrophone is made of low density composite material. And the inner vibration sensor, which can sense the vector message of the underwater sound field, is the acceleration sensors based on the MEMS technology. The difference of it to the typical vector hydrophone is to avail of the MEMS acceleration sensors. And this make the volume littler, at the same time, the whole density gets smaller.The miniature high performance sensor is designed using ANSYS software. We optimized the structure of silicon micro capacitance acceleration sensors of one cantilever and two cantilevers respectively. And they are fabricated with MEMS technology. The influence of the air damp to the whole sensor system is analyzed. We can choose the interval of movable pole and the fixed pole to adjust the damp of the system.According to the research results, we design the microstructure of two cantilevers, whose working frequency range is l-1000Hz. The samples are manufactured in the sensor company. We get the performance by measuring test, and the sensitivity of it is 932mV/g. We assemble a vector hydrophone with the samples, and the sensitivity of it is -190dB (0dB=1V/μ Pa, 800Hz) at velocity channels, more than 20dB higher than it of the silicon micro capacitance vector hydrophone made before. This provide basis to do more research for us.