Research On High Accuracy CCD Two-Axis Autocollimator

The work principle of the autocoUimator, the formation image and the data processing technique of Charge Coupled Device (CCD) are introduced in detailed in this article. In order to improve the steady of the autocollimator and realize two-axis measuring, it tries to use the CCD to take the place of photo electricity vibration assembly.CCD tiny photo principle analyzed in this paper. A math model is established, that improve the aiming precision.The relationship of the autocollimator reflects light-energy and reflector deflection angle is described. It adopts the way that software subdivide and make it show to 0.01 arc-second. It solved the technology problems of the signal transmission, drift and stability by combining the CCD and the autocollimator.In structure design, the optical system of the adoption was turned back type, and the instrument bulk was reduced.The sample machine had been manufactured with high accuracy. The CCD sensor realizes two-axis measuring at the same time .Experiments proves its rationality and feasibility.A new demarcated method is used, the multi-tooth dividing table form the standard small-angle. The error of indication of the autocollimator was contrasted in various ways.It made an analysis to the model machine, and put forward the improvement opinion.