Preparation Of Thin-film Solar Cell Window Material SnO₂ By PECVD And Its Performance Research

SnO₂ is a wide band-gap metal oxide, it can provide with strong visible light permeability, low resistance and stable chemical properties etc, so it is a suitable window material for thin-film solar cells. In this thesis, SnO₂ thin films with high visible light transmittance of 80%, low sheet resistance of 81?/â–¡, strong adhesion to the substrate have been fabricated by PECVD (Plasma Enhanced Chemical Vapor Deposition) method on glass substrate.This paper includes the following four parts:(1) Some of the basic knowledge of the solar energy and the solar cell are introduced briefly. It focuses on the characteristics, the structures of the thin-film solar cells, as well as the choice of window material; the background and main subject of study are clarified in this paper.(2) The various methods of SnO₂ film preparation and their advantages and disadvantages are introduced synthetically, and we choose the plasma enhanced chemical vapor deposition (PECVD) to prepare of SnO₂ film by comparing the various methods; PECVD experiment platform is designed, and the various parts of the platform are introduced.(3) The SnO₂ film was prepared in glass substrate with the raw material of SnCl2 and O2 by using PECVD, and their properties were analyzed by XRD, SEM, EDAX, UV, et al; the mechanism of the SnO₂ film preparation using PECVD is disscused.(4) The effects of process parameters on the crystal structure, surface morphology and photovoltaic characteristics of the SnO₂ film have been discussed. Though analyzing the experimental data, we find that the SnO₂ film is symmetrical and its performance of photoelectricity is also preferable. The purpose and tenet of this thesis is focused on the SnO₂ film using in the thin-film solar cells. That SnO₂ film fabricated by PECVD is an edificatory attempt. The results obtained are useful for reference to the choice of actual process.