The Fabrication And Research Of PIN Single Junction Amorphous Silicon Thin Film Solar Cells

The energy crisis,pollution of environment and greenhouse effect are the great challenges the human being are facing with,it becomes one of the most critical and influential technology areas to develop the new and renewable energy in 21^th century. as one of the most important way to use of the solar energy,it's more and more significant to research and develop the solar cells.Amorphous silicon thin film solar cells have a lot of advantages,such as simple fabrication,less consumption and can not only be made with low temperature on cheap substrate,but also decrease cost furthermore with the integration and big area process.Besides,it's easy to combine with the construction to compose the BIPV system.In this thesis,amorphous silicon thin film is deposited on glass and the single junction pin amorphous solar cells on TCO glass by the way of RF-PECVD.Here study mainly on the fabrication of amorphous silicon thin film material and solar cells, as well as the related factors that influence to them and the influence of the i layer thickness to the solar cells.The major research can be briefed in three respects:1) Study on the fabrication and test of amorphous silicon thin film material and solar cells;2) Fabrication of every layer of the solar cells,research of the related factors that influence to their performance,and chose the fit technics to deposit the solar cells.3) Study on the influence of the i layer thickness to the solar cells,research it's influence to the performance of the solar cells as V_OC,J_SC,F andη,and chose the optimized i layer thickness to the current deposition system.