| As an important branch of MEMS, micro actuators have received much concern in recent years. Micro actuators are widely used in various fields. It can be used for RF switches, phased antenna and so on. But there are some problems with present micro actuators.Based on the principle of compressive bar stable and MEMS Technology, a buckling micro actuator is designed with low driving voltage and large deformation. According to Euler's formula, we can get that the critical force is 39.4784N; when the axial load is 37.479N, the max deflection is 4.775mm; based on Hooke's law, the size of beam can be determined.Static analysis is made for the buckling micro actuator. Deflection curve equations are set up. Expression of the deflection is got, the relationship among deflection, axial load and driving force is given; based on deflection and electrostatic force expressions, the relationship among deflection, driving voltage and regulating voltage is given. Contrast with calculated results and simulation results, they are closely to each other. It also can get the results: the driving voltage is between 2V and 5V; regulating voltage is between 1V and 3V. The purposes of low driving voltage and small displacement are realized. Dynamic analysis is made for buckling micro actuator. The models of the first five orders have been made. At two different excitations, relationship between displacement and time, relationship between velocity and time and relationship between acceleration and time can be got. From the simulation result, response time of buckling micro actuator is 10μs. Results can be got: for the buckling micro actuator, when the operating frequency is between 20 GHz and 80GHz, the isolation is as high as-69 dB, and the insertion loss is as low as -0.001 dB.
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