Analysis And Design Of Micro Actuator Based On Vertically And Horizontally Bent

As an important branch of MEMS,micro actuators have received more and more concerns in recent years. Now, the development trend of micro actuators is to achieve low driving voltage, large displacement and fast response. Micro actuators presented in the paper can be used for airbag sensor ignition systems, trigger devices of spacecraft fairing off, RF switches, phased antennas and so on.Design requirements and purposes:the regulating, driving voltages do not exceed5V, the driven displacement is greater than or equal to10μm, and it realizes fast response. The paper includes the following:1. Based on the principles of commpressive bar buckling, vertically and horizontally bent theory, electrostatic drive theory and MEMS Technology, Straight beam and folding beam structural micro actuators are designed in this paper.2. Static analysis is made for the micro actuators. The buckling analysis of the micro beam by using ANSYS software shows that the largest displacement is as great as335μm. Based on vertically and horizontally bent theory, the influences of the micro actuator displacement include the axial force and lateral force. The axial force which includes the assembly extrusion pressure, regulating force and temperature stress is analyzed. Finally, the displacement curves which vary with each factors are drawed.3. The simulation analyses, including modal analysis and dynamic coupling analysis, are made for the two structural micro actuators with a multi-physics analysis software, COMSOL Multiphysics. The first five-order modal frequencies and the voltage-displacement curves have been made.The simulation results show that the straight beam structural micro actuator’s displacement is10.8μm and response time is2.6ms, the folding beam structural micro actuator’s displacement is14.7μm and response time is1.2ms when the driving voltage is5V.4. From the above results, it can be concluded that the driving displacement is more than10μm when the regulating and driving voltage do not exceed5V, the the response time is no more than3ms.5. According to the results of design, the3-D models and the parts of the two structural micro actuators are drawed out.