Fabrication Technology And Characteristic Of A New Type Mems Bi-stable Electromagnetic Relay

Micro relays as a kind of components are widely used and plays an essential role in the fields of aerospace, computer and communication. Communication relay is one of the main applications, its output value accounts for about a quarter of the entire relay industry, and it has more technical content and higher added value of relay products.A bi-stable electromagnetic actuator used in micro communication relay is studied. It is composed of a planar coil, a nickel elastic platform, and a silicon spacer. It uses double layers Cu coils and magnetized permalloy core to increase the driving force, uses polymide for isolation, and realizes the bi-stable mechanisms by permanent magnet. The middle of the coil in the plane and around a permalloy plating, so that drives film can form between flat coils and magnetic systems.In this paper, according to the structural parameters of the components identified by the theoretical analysis, we use multiple mask lithography and plating process to produce double-layer copper coil via a polyimide insulating layer technology, and use the glass substrate in the production of flexible platform. Through spinning SU-8 resist, nickel flexible platform and gasket are achieved, which proves the possibility of the integration process, and make a solid foundation for the next step to achieve the overall integration. In this paper, we also completed the overall integration process of springs, gaskets, and coils, achieved the overall integrated program for the overall integrated manufacturing of next generation of micro-relay.This paper has done a series of tests about the performance of the micro electromagnetic relay after the process was implemented. The test of the elasticity of the spring was carried out by the measurement of the relationship between magnetic force and displacement curve to fit the spring constant; bulit test platform, measured the output characteristics of the micro-magnetic drive by microscopes and other equipment, test the performance of the plane Micro electromagnetic relay coil; Having a test of bi-stable commissioning, found the operating point of the bi-stable MEMS micro electromagnetic relay by experiment, and verified the feasibility of this bi-stable micro electromagnetic drive prototype; Displacement of dynamic response testing, studied the dynamic response of the micro-electromagnetic relay and analyzed the dynamic response of the flexible platform at different voltages, pulse width and gaps. The experiment results provided the electrical parameters which can achieve stable "on-off" transition, this works lay a solid foundation for achieving more responsive of the next generation of the micro switch.