Research On The Nano-meter Thermal Drive-part System Based On Temperature Half-feedback Control

In this dissertation , after the analysis of ultra-precision manufacturing in and abroad, a project of thermal drive-part based on half-feedback temperature control thought is brought forward. Meanwhile, each chapter of this dissertation is arranged as follows.Chapter 1 ,after the important role of the research of ultra-precision manufacturing and the review of current status technology and future development trend of micro-displacement machine are given, the research content of this dissertation is arranged.Chapter 2, after the analysis of normal micro-displacement machines and thermal distortion in manufacturing, half-feedback control of temperature thought is considered and the thermal distortion part as the control unit in micro-displacement system is brought forward. A detailed design of the experiment project is established.Chapter 3,to study the temperature field change of the thermal distortion part during the heating up and cooling well, a temperature measuring and control system was designed to record the data based on virtual instrument idea, A detailed introduction of the system is supplied in this chapter.Chapter 4, Based on voluminous experiments, mathematics model of temperature of thermal drive-part is given through gradual-subsection...