Research On Nano Precision Thermal Drive Parts Having Large Feeding Force

In order to realize nano feeding under large feeding force, according to the research state of nano feeding device and development tendency all over the world, combing with china "863" Program "the key technic research of nano precision drive parts having large feeding force", a scheme of nano precision drive parts with bilateral symmetrical structure using in quasi-static state conditions is proposed, the nano precision thermal drive parts are developed and the experimental system is established. To solve the contradiction between control precision and response speed, in allusion to the characteristics of nonlinear and time-variation, a compensatory method and stepped exponential fitting method are presented, and then, the mathematic modal is established based on these methods, and the research of corresponding control strategy is done. Including:Chapter 1, the importance of super precision processing is represented, combing with the research state and the developmental tendency of nano feeding device all over the world, the research content and the arrangement of each chapter are presented in this chapter.Chapter 2, the structure of bilateral symmetrical drive parts having large feeding force is presented, the researches on the relation of feeding quantity with input power, invert efficiency, physical parameters, geometrical parameters, and environmental factors is made, and the response and nonlinear characteristic of the drive parts is analyzed.Chapter 3, the mathematic modal of drive parts is established based on thermal conduction differential equation, in illusion to the multistage exponential function with large discrepant time constant, the stepped exponential fitting method is proposed. Then, according to the principle that the pole of controllable system can be arbitrarily collocated, the generalized mathematic modal of drive parts is established by the offset between poles and zeroes.Chapter 4, to give attention to robust, response speed and control precision, the improved slide mode and alterable structure control strategy based on the generalized mathematic modal, the stepped gradual slide mode and alterable structure self-adaptive control strategy, and multistage smooth transition strategy based on penalty function are researched.Chapter 5, the hardware circuit and software design outline of nano precision thermal drive parts are introduced in this chapter, the control system is presented. The hardware and software of the experimental system of the nano precision thermal drive parts are dissertated, the data transfer and software design of metrical computer and the high precision inductance measure displacement quadratic instrument are explained.Chapter 6, the applied research of the drive parts is made based on the experimental system of the nano precision thermal drive parts. The improved slide mode and alterable structure control strategy based on the generalized mathematic modal, the stepped gradual slide mode and alterable structure self-adaptive control strategy, and multistage smooth transition strategy based on penalty function are emphasized in this chapter.Chapter 7, the full paper is generalized and the next research work is prospected.