A Study On Pulsed Laser Deposition Of Diamond-like Carbon Films

In this paper, the recently development of pulsed laser deposition of diamond-like carbon films were introduced. And a briefing on the principles of equipment and performance parameters, used for charactering samples. The test instruments included: Raman spectrometer, AFM, XPS spectrometer.The substrates were Si, Al2O3 and 316L surgical stainless steel. We mainly used Raman spectroscopy to evaluate the samples. The samples were horizontally and vertically evaluated and researched.For Si substrates, the impact on the diamond-like carbon films structure had been studied, while it altered the pulsed laser energy or the deposition temperature. It was found that higher energy resulted higher sp3 bonding in the films. When it reached a certain thickness value, the films would delaminate as a result of the compressive stress. It was also noted that lower deposition temperature gave more sp3 bonding and more diamond property. As deposition temperature rose, sp3 bonding decreased. And the amorphous sp2 bonding transformed into graphite phase which indicated that the films became graphitization. It also showed that the surface morphology was affected by the deposition temperature.For Al₂O₃ substrates and 316L surgical stainless steel substrates, it pointed out that the deposition time and the deposition temperature influenced both the films configuration and the films deposition. As for the adhesion, Si substrates were stronger than Al2O3 substrates. In the deposition progress, the films configuration lied on the combined effects of each parameter. So these parameters could be synthetically optimized. And it was found that good adhesion between 316L surgical stainless steel substrates and the films. If the deposition parameters were uniform, it could be deposited almost the same films configuration on Si substrates and 316L surgical stainless steel substrates.